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Chp. 7 Summary
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Total cards: 3•Content version: v4•Public deck•Updated: 8/1/2026
Card preview (3)
#1
Front (Question)
Difference between interdiffusion and self-diffusion
Back (Answer)
The term interdiffusion refers to the migration of impurity atoms; for host atoms, the term self-diffusion is used.
#2
Front (Question)
The magnitude of the diffusion coefficient indicates
Back (Answer)
the rate of atomic motion and depends on both host and diffusing species as well as on temperature.
#3
Front (Question)
The two heat treatments used to diffuse impurities into silicon during integrated circuit fabrication
Back (Answer)
• predeposition - drive-in